第578章【紫星极紫外光刻机】(2 / 2)

但没关系,拿市场以及共同的利益维系着就行了,拿到了既得利益就会为这份利益尽心尽力。

在场的一位来自友商的技术负责人走到罗晟旁边,“罗先生,光刻机的主要性能指标,支持基片的尺寸范围、分辨率、对准精度、曝光方式、光源波长、光强均匀性、生产效率等技术痛点目前都已经解决了。”

罗晟点点头,问道:“光源系统方面的技术问题呢?”

对方立即回道:“也基本解决了。”

罗晟:“基本?那就是还没完全解决了,尽快解决。”

值得一提的是,EUV光源系统的组成,光源由光的产生、光的收集、光谱的纯化与均匀化三大单元组成,相关的工作元器件主要包括大功率CO2、激光器、多层涂层镜、负载、光收集器、掩膜版、投影光学系形成等离子体,等离子利用多层膜反射镜多次反射净化能谱,从而获得13.5纳米的EUV光。

仅仅是这么一个光源的问题就要牵涉到了十多家厂商来研发配套,足见这玩意制造难度之高了,仅仅是砸足够的钱还是次要的,技术更是重要,国内相关的厂商实际上又没有核心科技。

但好在罗晟自己掌握的技术再通过小娜的针对EUV光刻机的补全模拟获得了相应的技术,然后把技术分发给各大厂商按标准制造,同时也把技术授权给他们。

正因为技术授权这一点,才能把各大厂商维系在一起。

靠觉悟和理想?

罗晟虽然喜欢这么说,但他从来不会去这么做。

否则这么复杂的链条,一旦某个环节的厂商闹情绪大家都干瞪眼,这是罗晟不能允许的发生的事情,投入的资金成本、时间成本、沉没成本都是天文数字,必须要给他们一点掣肘,否则队伍就不好带了。

关于极紫外光刻机的命名早已经被确定了,代号“紫星光刻机”,这也是国产自主研发不依靠国外技术当时的最先进的光刻机设备。

紫星光刻机的问世,将宣告着国产光刻机设备与ASML旗下的EUV光刻机处于同一梯队,彻底打破了顶尖光刻机设备被外国人垄断的局面。

罗晟收回目光看向在场的各大厂商派来协同的技术大拿们说道:“紫星光刻机可以使用波长13.5纳米的极紫外光,从而实现14纳米、10纳米、和7纳米制程的芯片生产,而通过技术迭代升级,未来也可以实现9纳米、8纳米、6纳米、5纳米、4纳米乃至3纳米等制程的芯片生产。”

“技术升级方案蔚蓝海岸实验室一直在做,升级迭代必须是协同的,有需要的时候各大供应链伙伴来我这里要技术授权分发即可,诸位回去之后顺带把话带给你们的老总,我就不跟他们一一联系了。”

众人都连连点头,这种模式简单的说研发尤其理论端,蔚蓝海岸实验室在做这些。

供应链伙伴负责把罗晟的想法实现,就是把实物按标准造出来,这没有谁更难一说,都很难,只不过创造性相对难一点。

要知道,把这些技术交给隔壁的三哥,让他们照着抄也搞不定,把东西按标准造出实物设备也是要有底子才行,这是制造业的底子。

……

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